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    Reticle Stocker
    Reticle Stocker is designed for the storage and transport of photomask pods in semiconductor clean rooms. It offers both automatic and manual docking with OHT, ensuring the quality of photomasks and ultimately enhancing the overall product yield of wafer factories. The MF Reticle Stocker is adaptable to models with hoist and without hoist.

    Optional configuration: Manual Port / Number of OHT Ports / Purge Function / Auto Teaching / RFID / Wireless Power Supply
    Feature Highlights:

    User-friendly man-machine interface

    Stable system integration

    SEMI-compliant pitch design

    Included purge system and purge statistics function

    Docking with multiple MCSs

    Flexible configuration of port numbers

    Integrated purge function

    Software Description
    MSSC Storage Control System
    MeetFuture Smart Storage Controller
    This system provides intelligent management for STK, adhering to the SEMI E88 protocol. It receives command assignments from upper-level systems like MCS to handle the warehousing and delivery of wafer cassettes. With a 3D camera, the AutoTeach function can be quickly implemented, simplifying factory installation and implementation. It also supports the reading of RFID, Smart Tag, and other tags. Equipped with self-developed RFID, SmartTag, and E84 modules, the reading success rate of this equipment reaches the industry's leading standard.

    Application Scenario: Storage Equipment Control and Inventory Query

    Feature Highlights:
    ▪ The MeetFuture intelligent storage control system utilizes an advanced intelligent algorithm to optimize instruction execution and materials management logic in the storage library. This results in shorter access and handling times for wafer cassettes, thereby increasing the frequency and utilization efficiency of the storage library.
    ▪ Supports docking with a variety of mainstream MCS for efficient system implementation.
    ▪ Enables real-time monitoring of multi-channel gas flow, pressure, and humidity.
    Important Parameters
    Technical IndicatorsParameters
    Dimensions (L*W*H)

    8300(customizable)*1430*5350 mm (customizable)

    Weight (full/empty)7.2t

    Positioning Accuracy

    ±0.5mm

    Storage Type

    Reticle

    Clean Grade

    ≤Class100

    Throughput

    ≥180Lot/H

    Vibration

    <0.5g

    Noise

    <75DB


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