• Ebpay

    Autonomous Robot(AMR)
    Carries FOUP/POD on the floor of the semiconductor wafer factory and connects to MRC for task scheduling;
    Facilitates handling between equipment and equipment, as well as between equipment and E-Rack.
    Feature Highlights:

    User-friendly man-machine interface

    Stable system integration

    Docking with multiple devices

    Certified with Semi S2, Semi S17 standards

    Important Parameters
    Technical IndicatorsParameters
    Loading Capacity

    2 Foups

    Clean Grade

    Class100

    MR Certification Standards

    Semi S2,Semi S17

    Endurance

    8h

    Charging mode

    Manual battery replacement or automatic charging

    Charging Duration

    4h

    Navigation Mode

    Safety Scan Laser, SLAM Scan


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